The Analytical SEM for Studying Large, Heavy & Tall Samples.

• Large sample up to 300mm in diameter
• Observable area up to 203mm in diameter
• Observation and EDS analysis on a sample up to 110mm tall
• Versatile port layout for various analytical applications

A yet more user-friendly SEM through newly developed electron optics and Automatic functions.

• Revolutionary automatic axis-alignment functions
  (Auto Beam Setting, Auto Axial Alignment, etc.)
• Even better resolution of 10nm at 3kV
• Saving floor space and electric power consumption due to TMP evacuation system

A unique real time vacuum feedback system gives chamber vacuum stability even if the specimen outgases. The large chamber will accommodate samples up to 150mm in diameter. A solid state backscattered detector is supplied and 4.5nm resolution can be achieved in VP mode.

The S-3000H can accommodate specimens up to 150mm in diameter, and offers a choice of specimen stages including eucentric, Cartesian, tensile and cryogenic versions for a wide range of applications. A host of automatic functions are complemented by a resolution of 3.5nm resolution.

Operating in the 1 - 270Pa pressure range, the S-2600N delivers 5.0nm resolution in VP mode. The instrument is designed for ease of use and features an integral image filing and processing system.