FIB (Focused lon Beam System)

Focused lon Beam System FB-2100

(S)TEM/SEM specimen can be prepared with rapidity and accuracy.
 

  • High milling rate with accelerating voltage up to 40kV
  • In-situ microsample extraction from specific site with Hitachi's patented "Micro-sampling" (optional accessory)
  • Compatible specimen holder available for (S)TEM(HD-2700, HD-2300A, H-9500) and SEM(S-5500). (A common stage is to be selected.)